What is reticle inspection?
Reticle inspection tools employ high resolution imaging optics and either VIS or UV illumination, depending on defect tolerances and/or feature sizes, to find defects on a reticle blank or a patterned reticle. Inspections are routinely performed during the reticle manufacturing process and throughout the reticle usage.
How are wafers Inspected?
The wafer defect inspection system detects defects by comparing the image of the circuit patterns of the adjacent dies. As a result, systematic defects sometimes cannot be detected using a conventional wafer defect inspection system. Inspection can be performed on a patterned process wafer or on a bare wafer.
What is bright field inspection Semiconductor?
Bright-field inspection is used by chipmakers to find the most critical defects during wafer manufacturing. Traditional bright-field systems use a multiwavelength lamp source, single light-detection channel, and CCD detection, providing users with limited imaging capability.
What is semiconductor inspection?
What is inspection? Inspection in the semiconductor wafer manufacturing process. It involves the use of inspection equipment to check for compliance or non-compliance, as well as abnormality or unsuitability, in terms of specific criteria. It is a process for detecting any particles or defects in a wafer.
What is reticle in semiconductor?
In semiconductor manufacturing, a “reticle” is a “photomask.” At one time, the term “photomask” was used to describe a “master template” used with a 1X stepper or lithography system. The term “reticle” was used to described a “master template” used in a 2X, 4X or 5X reduction stepper.
What is a semiconductor mask?
Masks and Reticles. Semiconductor manufacturing entails the formation of various patterns on wafers. These patterns define the structure of and interconnection between the different components and features of the integrated circuit. The patterns are formed on wafers using patterning tools known as masks and reticles.
What is dark field inspection?
Dark Field Technologies builds state of the art systems for industrial surface inspection and defect detection. Our automated NxtGen™ systems allow manufacturing professionals to perform inspections earlier, faster, and more reliably.
What is patterned wafer inspection?
Patterned wafer inspection systems compare the image of a test die on the wafer with that of an adjacent die (or of a “golden” die known to be defect free). Image processing software subtracts one image from the other.
What is metrological inspection?
Metrology is the science of measurement. Inspection is measuring, examining, testing, or gauging one or more characteristics of a product or service and comparing the results with specified requirements to determine whether conformity is achieved for each characteristic. Testing is appraising characteristics of …
What is reticle masking?
The term Photomask (sometimes abbreviated to Mask) is used to mean any type of glass plate with a pattern etched into an opaque surface. A Reticle is a special type of photomask where the data for only part of the final exposed area is present.
What is reticle limit?
The reticle size limits the amount of chip surface area that can be exposed using a single mask. This is set by the litho equipment, which define the largest size that can be exposed without errors being caused by distortion or imperfections in the mask.
What is the difference between mask and reticle?
– A mask is defined as a tool that contains patterns which can be transferred to an entire wafer or another mask in just a single exposure. – A reticle is defined as a tool that contains a pattern image that needs to be stepped and repeated in order to expose the entire wafer or mask.